Handbook of Advanced Plasma Processing Techniques

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The ability to make small features in Si, metals, dielectrics and other materials is what has enabled rapid advances in computing, communications, aeronautics and all other technologies that depend on microelectronics, miniature sensors and actuators and magnetic data storage. Plasma techniques enable the fine control and accurate pattern transfer and thus are central to our technology age.

Format:Hardcover

Language:English

ISBN:3540667725

ISBN13:9783540667728

Release Date:August 2000

Publisher:Springer

Length:655 Pages

Weight:2.32 lbs.

Dimensions:1.2" x 6.5" x 9.4"

Related Subjects

Aerospace Electrical & Electronics Industrial, Manufacturing & Operational Systems Mechanical Science Science & Math Science & Scientists Science & Technology Welding

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Handbook of Advanced Plasma Processing Techniques

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